Kurzfassung

Metal nanostructured devices and surfaces provide huge application spectra for electrochemicalsensors , chemical reactors or – after replication in polymer materials – for microfluidic devices.We use two different template techniques to get metal nanostructures as devices or as stampsfor further replication techniques like moulding or casting: Nano Imprint Lithography (NIL) andAnodic Aluminium Oxidation (AAO). Using NIL, a nanostructured PMMA template with nanostructures down to 20nm in...Metal nanostructured devices and surfaces provide huge application spectra for electrochemicalsensors , chemical reactors or – after replication in polymer materials – for microfluidic devices.We use two different template techniques to get metal nanostructures as devices or as stampsfor further replication techniques like moulding or casting: Nano Imprint Lithography (NIL) andAnodic Aluminium Oxidation (AAO). Using NIL, a nanostructured PMMA template with nanostructures down to 20nm in user-defineddesigns can be fabricated. These template structures are then replicated by electroless platingand electroplating in order to transfer the nanostructured negative in e.g. nickel. In Fig.1 nickelmeander structures are shown as an example.AAO is used to realise an aluminium oxide template with regular nanopores (Fig.2) by usingetching techniques. To receive hexagonal, self ordering nanopores, a two step anodisation tech-nique can be used. Subsequent electroplating gives either regular nanostructured flat surfacesor nanowires – depending on the aspect ratio of the AAO templates. We are able to fabricatetemplates with nanopores up to 1 μm, with a lateral structure dimension of 20nm to 80nm. » weiterlesen» einklappen