Preparation of superconducting thin films of YBa2Cu3O7, by dc-magnetron-sputtering
Physica C. Bd. 153. 1988 S. 782 - 783
Erscheinungsjahr: 1988
Publikationstyp: Zeitschriftenaufsatz (Forschungsbericht)
Sprache: Englisch
Doi/URN: 10.1016/S0921-4534(88)80086-8
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Inhaltszusammenfassung
We report on the preparation of superconducting thin films of YBa2Cu3O7, by dc-magnetron-sputtering from a single cathode. Using SrTiO3 single crystal substrates, Tc's around 90K were reproducibly obtained. Structure and stoichiometry of the films were studied by X-ray-diffraction, Rutherford backscattering analysis and secondary neutral mass spectroscopy. We further discuss the origin of the Tc-degradation of films prepared on sapphire substrates.
Autoren
Schmitt, P. (Autor)
Gerhäuser, W. (Autor)
Möhle, W. (Autor)
Hensel, B. (Autor)
Klassifikation
DFG Fachgebiet:
Physik der kondensierten Materie
DDC Sachgruppe:
Physik
